Silicon micromachined waveguide components at 0.75 to 1.1 THz

Description: Silicon micromachined waveguide components operating in the WM-250 (WR-1) waveguide band (0.75 to 1.1 THz) are measured. Through lines are used to characterize the waveguide loss with and without an oxide etch to reduce the surface roughness. A sidewall roughness of 100nm is achieved, enabling a wav...
Language(s): Catalán
Subject(s): Telecomunicaciones
Publisher(s): E.T.S.I. Telecomunicación (UPM)
Contributor(s):
Source(s): 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz 2014) | 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz 2014) | 14/09/2014 - 19/09/2014 | Tucson, Arizona, EE.UU
Publication Date(s): 2014-01-01
Type(s): Publicaciones de conferencias: comunicaciones, ponencias, pósters, etc (conferenceObject)
Rights(s): http://creativecommons.org/licenses/by-nc-nd/3.0/es/ , info:eu-repo/semantics/openAccess
Relation(s): info:eu-repo/semantics/altIdentifier/doi/10.1109/IRMMW-THz.2014.6956008
Estadísticas: Ocultar/Mostrar estadísticas
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